This course will build on the fundamentals of semiconductor manufacturing and its applications in micromechanical systems. Microsystems technology explores the science of miniaturization (the science of making small things). The course will discuss top-down and bottom-up manufacturing techniques, lithography, pattern transfer using additive and subtractive techniques, wet bulk micromachining, surface micromachining, LIGA and micromolding, scaling laws, and applications of miniaturized devices. Some examples of micro-devices such as accelerometers, pressure sensors, chemical sensors and biomedical sensors will be discussed.
ME 5314: Microsystems Technology
Department